Principles of physical vapor deposition of thin films
- 資料種別:
- 図書
- 責任表示:
- K.S. Sree Harsha
- 言語:
- 英語
- 出版情報:
- Amsterdam ; Tokyo : Elsevier, 2006
- 形態:
- xi, 1160 p. : ill. ; 25 cm
- 著者名:
- SreeHarsha, K. S. <DA0260044X>
- 書誌ID:
- BA76872166
- ISBN:
- 9780080446998 [008044699X]
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